Yttrium aluminum garnet thermal spray powders
Key words:
Yttrium aluminum garnet thermal spray powders
Classification:
- Product Description
-
Chemical composition (%)
Code
Chemical composition (ppm)
Y2O3
Al2O3
SiO2
Fe2O3
CaO
MgO
Y3AI5O12
52-58
42-48
≤0.05
≤0.05
≤0.05
≤0.05
Physical performance parameters
Morphology
Color
Density
Agglomerated sintered spherical powder
White
1.1-1.5 g/cm3
Product particle size
Particle size (μm)
-75+15
-45+15
Customizable
Main applications
Yttrium aluminum garnet thermal spraying powder is applied in the semiconductor and liquid-crystal-display (LCD) production equipment with Anti plasma erosion resistance.such as plasma etch equipments vacuum chamber walls and other components, ESC (Electrostatic chuck) , CVD equipments,Linings for graphite molds.
Previous Yttrium oxide thermal spray powders
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