

Yttrium oxide thermal spray powders
Key words:
Yttrium oxide thermal spray powders
Classification:
- Product Description
-
Chemical composition (%)
Chemical composition (ppm)
Y2O3
Fe
Na
Mg
Al
Si
K
Ca
>99.9%
10
<1
<2
<1
<10
<20
8
Physical performance parameters
Morphology
Color
Density
Agglomerated sintered spherical powder
White
1.1-1.5 g/cm3
Product particle size
Particle size (μm)
-63+22
-45+15
-28+10
Customizable
Main applications
High purity yttrium oxide thermal spraying powder is applied in the semiconductor and liquid-crystal-display (LCD) production equipment with Anti plasma erosion resistance.such as plasma etch equipments vacuum chamber walls and other components, ESC (Electrostatic chuck) , CVD equipments,Linings for graphite molds.
Previous Zirconia based thermal spray powders (ZrO₂/Y₂O₃, ZrO₂/CaO,ZrO₂/MgO,Gd₂O₃/ZrO₂,ZrO₂/Y₂O₃-Yb₂O₃-Gd₂O₃)
Next Yttrium aluminum garnet thermal spray powders
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